Publication:
Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4 -precursor and H2 -plasma
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1954 since deposited on 2021-10-22
3last month
1last week
Acq. date: 2025-12-09
Citations
Metrics
Views
1954 since deposited on 2021-10-22
3last month
1last week
Acq. date: 2025-12-09
Citations