Publication:
Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies
Date
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T01:33:18Z | |
| dc.date.available | 2021-10-16T01:33:18Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10446 | |
| dc.source.beginpage | 45 | |
| dc.source.endpage | 53 | |
| dc.source.journal | Materials Science and Engineering B | |
| dc.source.volume | 124-125 | |
| dc.title | Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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