Publication:

Lithography aspects of dual damascene interconnect technology

Date

2001

Proceedings Paper

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Files

5477.pdf 1.89 MB

Author(s)

Maenhoudt, Mireille

;

Vangoidsenhoven, Diziana

;

Pollentier, Ivan

;

;

;

Struyf, Herbert

;

Van Hove, Marleen

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