Publication:

Challenges with SOT-MRAM integration towards N5 node and beyond

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2613482
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dc.contributor.authorGupta, Mohit
dc.contributor.authorPerumkunnil, Manu
dc.contributor.authorYasin, Farrukh
dc.contributor.authorMirabelli, Gioele
dc.contributor.authorGarello, K.
dc.contributor.authorGupta, Anshul
dc.contributor.authorFurnemont, Arnaud
dc.contributor.authorKar, Gouri Sankar
dc.contributor.imecauthorGupta, Mohit
dc.contributor.imecauthorPerumkunnil, Manu
dc.contributor.imecauthorYasin, Farrukh
dc.contributor.imecauthorMirabelli, Gioele
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.orcidimecGupta, Mohit::0000-0002-1924-1264
dc.contributor.orcidimecPerumkunnil, Manu::0000-0002-0029-6548
dc.contributor.orcidimecYasin, Farrukh::0000-0002-7295-0254
dc.contributor.orcidimecMirabelli, Gioele::0000-0001-7060-4836
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.date.accessioned2023-02-20T10:03:54Z
dc.date.available2022-09-16T02:49:54Z
dc.date.available2023-02-20T10:03:54Z
dc.date.issued2022
dc.identifier.doi10.1117/12.2613482
dc.identifier.eisbn978-1-5106-4980-4
dc.identifier.isbn978-1-5106-4979-8
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40426
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage1205202
dc.source.conferenceConference on DTCO and Computational Patterning
dc.source.conferencedateAPR 24-MAY 27, 2022
dc.source.conferencelocationSan Jose, CA, USA
dc.source.endpagena
dc.source.journalProceedings of SPIE
dc.source.numberofpages9
dc.source.volume12052
dc.title

Challenges with SOT-MRAM integration towards N5 node and beyond

dc.typeProceedings paper
dspace.entity.typePublication
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