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Development of a novel metal-insulator-semiconductor planar capacitor test structure and its applications in Cu interconnect research

Date

2012-08
Dissertation
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cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.department2a78d337-4e10-475c-bbd0-f05a3d9cb7d5
cris.virtualsource.orcid2a78d337-4e10-475c-bbd0-f05a3d9cb7d5
dc.contributor.advisorClaeys, Corneel
dc.contributor.authorZhao, Lie
dc.date.accessioned2026-06-01T12:25:44Z
dc.date.available2026-06-01T12:25:44Z
dc.date.issued2012-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59502
dc.provenance.editstepusermeghan.oneill@imec.be
dc.title

Development of a novel metal-insulator-semiconductor planar capacitor test structure and its applications in Cu interconnect research

dc.typePHD thesis
dspace.entity.typePublication
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