Publication:
Chemical and structural characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy and transmission electron microscopy
Date
| dc.contributor.author | De Gryse, O. | |
| dc.contributor.author | Clauws, P. | |
| dc.contributor.author | Vanhellemont, J. | |
| dc.contributor.author | Lebedev, O. | |
| dc.contributor.author | Van Landuyt, J. | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T21:21:30Z | |
| dc.date.available | 2021-10-14T21:21:30Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6188 | |
| dc.source.beginpage | 183 | |
| dc.source.conference | High Purity Silicon VII | |
| dc.source.conferencedate | 20/10/2002 | |
| dc.source.conferencelocation | Salt Lake City, UT USA | |
| dc.source.endpage | 194 | |
| dc.title | Chemical and structural characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy and transmission electron microscopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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