Publication:
Wafer-scale integration of double gated WS2-transistors in 300mm Si CMOS fab
| dc.contributor.author | Asselberghs, Inge | |
| dc.contributor.author | Smets, Quentin | |
| dc.contributor.author | Schram, Tom | |
| dc.contributor.author | Groven, Benjamin | |
| dc.contributor.author | Verreck, Devin | |
| dc.contributor.author | Afzalian, Aryan | |
| dc.contributor.author | Arutchelvan, Goutham | |
| dc.contributor.author | Gaur, Abhinav | |
| dc.contributor.author | Cott, Daire | |
| dc.contributor.author | Maurice, Thibaut | |
| dc.contributor.author | Brems, Steven | |
| dc.contributor.author | Kennes, Koen | |
| dc.contributor.author | Phommahaxay, Alain | |
| dc.contributor.author | Dupuy, Emmanuel | |
| dc.contributor.author | Radisic, Dunja | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Thiam, Arame | |
| dc.contributor.author | Li, Waikin | |
| dc.contributor.author | Devriendt, Katia | |
| dc.contributor.author | Huyghebaert, Cedric | |
| dc.contributor.imecauthor | Asselberghs, I | |
| dc.contributor.imecauthor | Smets, Q. | |
| dc.contributor.imecauthor | Schram, T. | |
| dc.contributor.imecauthor | Groven, B. | |
| dc.contributor.imecauthor | Verreck, D. | |
| dc.contributor.imecauthor | Afzalian, A. | |
| dc.contributor.imecauthor | Arutchelvan, G. | |
| dc.contributor.imecauthor | Gaur, A. | |
| dc.contributor.imecauthor | Cott, D. | |
| dc.contributor.imecauthor | Maurice, T. | |
| dc.contributor.imecauthor | Brems, S. | |
| dc.contributor.imecauthor | Kennes, K. | |
| dc.contributor.imecauthor | Phommahaxay, A. | |
| dc.contributor.imecauthor | Dupuy, E. | |
| dc.contributor.imecauthor | Radisic, D. | |
| dc.contributor.imecauthor | De Marneffe, J-F | |
| dc.contributor.imecauthor | Thiam, A. | |
| dc.contributor.imecauthor | Li, W. | |
| dc.contributor.imecauthor | Devriendt, K. | |
| dc.contributor.imecauthor | Huyghebaert, C. | |
| dc.contributor.orcidimec | Smets, Quentin::0000-0002-2356-5915 | |
| dc.contributor.orcidimec | Schram, Tom::0000-0003-1533-7055 | |
| dc.contributor.orcidimec | Groven, Benjamin::0000-0002-5781-7594 | |
| dc.contributor.orcidimec | Verreck, Devin::0000-0002-3833-5880 | |
| dc.contributor.orcidimec | Afzalian, Aryan::0000-0002-5260-0281 | |
| dc.contributor.orcidimec | Brems, Steven::0000-0002-0282-8528 | |
| dc.contributor.orcidimec | Dupuy, Emmanuel::0000-0003-3341-1618 | |
| dc.contributor.orcidimec | Devriendt, Katia::0000-0002-0662-7926 | |
| dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
| dc.contributor.orcidimec | Morin, Pierre::0000-0002-4637-496X | |
| dc.contributor.orcidimec | Radu, Iuliana::0000-0002-7230-7218 | |
| dc.date.accessioned | 2021-12-08T11:04:21Z | |
| dc.date.available | 2021-12-06T02:06:35Z | |
| dc.date.available | 2021-12-08T11:04:21Z | |
| dc.date.issued | 2020 | |
| dc.identifier.doi | 10.1109/IEDM13553.2020.9371926 | |
| dc.identifier.eisbn | 978-1-7281-8888-1 | |
| dc.identifier.issn | 2380-9248 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38548 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Electron Devices Meeting (IEDM) | |
| dc.source.conferencedate | DEC 12-18, 2020 | |
| dc.source.conferencelocation | San Francisco, CA, USA | |
| dc.source.journal | na | |
| dc.source.numberofpages | 4 | |
| dc.title | Wafer-scale integration of double gated WS2-transistors in 300mm Si CMOS fab | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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