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Monolithic integration of InGaAs on Si(001) substrate for logic devices

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dc.contributor.authorMerckling, Clement
dc.contributor.imecauthorMerckling, Clement
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.date.accessioned2021-10-25T23:23:45Z
dc.date.available2021-10-25T23:23:45Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31335
dc.identifier.urlhttps://www.sciencedirect.com/science/article/pii/B9780081020616000033
dc.source.beginpage71
dc.source.bookHigh Mobility Materials for CMOS Applications
dc.source.endpage114
dc.title

Monolithic integration of InGaAs on Si(001) substrate for logic devices

dc.typeBook chapter
dspace.entity.typePublication
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