Publication:

Microwave Properties of Ba-Substituted Pb(Zr0.52Ti0.48)O3 after Chemical Mechanical Polishing

Date

2023
Journal article
https://doi.org/10.1149/2162-8777/acf4bb
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dc.contributor.authorLuciano, Federica
dc.contributor.authorTeugels, Lieve
dc.contributor.authorMcMitchell, Sean
dc.contributor.authorTalmelli, Giacomo
dc.contributor.authorGuerenneur, Anais
dc.contributor.authorStheins, Renzo
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorConard, Thierry
dc.contributor.authorVaesen, Inge
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorVan Dorpe, Pol
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDekkers, Matthijn
dc.contributor.authorSwerts, Johan
dc.contributor.authorCiubotaru, Florin
dc.contributor.authorAdelmann, Christoph
dc.contributor.imecauthorLuciano, Federica
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorMcMitchell, Sean
dc.contributor.imecauthorTalmelli, Giacomo
dc.contributor.imecauthorGuerenneur, Anais
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVaesen, Inge
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorVan Dorpe, Pol
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorCiubotaru, Florin
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecLuciano, Federica::0000-0001-7616-1810
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecMcMitchell, Sean::0000-0002-9916-0973
dc.contributor.orcidimecTalmelli, Giacomo::0000-0001-7763-7008
dc.contributor.orcidimecGuerenneur, Anais::0000-0002-0357-3619
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVaesen, Inge::0000-0003-3533-4679
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.contributor.orcidimecVan Dorpe, Pol::0000-0003-0918-1664
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecSwerts, Johan::0000-0001-7547-7194
dc.contributor.orcidimecCiubotaru, Florin::0000-0002-7088-2075
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2024-01-22T13:22:00Z
dc.date.available2023-12-25T17:40:02Z
dc.date.available2024-01-22T13:22:00Z
dc.date.issued2023
dc.description.wosFundingTextThis work has been supported by imec's industrial affiliate program on Exploratory logic. It has been partially funded by the European Union's Horizon 2020 research and innovation program within the European Innovation Council Pathfinder FET-OPEN project CHIRON under grant agreement No. 801055. F. L. and A. G. acknowledge support by the Research Foundation Flanders (FWO) through the PhD fellowships under grant agreements No. 1183722 N and 1S97822N.
dc.identifier.doi10.1149/2162-8777/acf4bb
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43303
dc.publisherELECTROCHEMICAL SOC INC
dc.source.beginpage094006
dc.source.endpageNA
dc.source.issue9
dc.source.journalECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
dc.source.numberofpages7
dc.source.volume12
dc.subject.keywordsPZT THIN-FILMS
dc.subject.keywordsTRANSDUCER
dc.title

Microwave Properties of Ba-Substituted Pb(Zr0.52Ti0.48)O3 after Chemical Mechanical Polishing

dc.typeJournal article
dspace.entity.typePublication
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