Publication:
Automated probe mark analysis
Date
| dc.contributor.author | Rong, Yu-Rong | |
| dc.contributor.author | Wu, Cheng-Wen | |
| dc.contributor.author | Fodor, Ferenc | |
| dc.contributor.author | Marinissen, Erik Jan | |
| dc.contributor.imecauthor | Fodor, Ferenc | |
| dc.contributor.imecauthor | Marinissen, Erik Jan | |
| dc.contributor.orcidimec | Marinissen, Erik Jan::0000-0002-5058-8303 | |
| dc.date.accessioned | 2021-10-26T02:49:04Z | |
| dc.date.available | 2021-10-26T02:49:04Z | |
| dc.date.issued | 2018-06 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31682 | |
| dc.identifier.url | http://www.swtest.org/swtw_library/2018proc/PDF/S08_02_Jian_SWTW2018.pdf | |
| dc.source.conference | Semiconductor Wafer Test Workshop - SWTW | |
| dc.source.conferencedate | 3/06/2018 | |
| dc.source.conferencelocation | San Diego, CA USA | |
| dc.title | Automated probe mark analysis | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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