Publication:
Effect of linear antenna chemical vapor deposition process parameters on the growth of nanocrystalline diamond-on-GaN films
| dc.contributor.author | Mallik, Awadesh | |
| dc.contributor.author | Pobedinskas, Paulius | |
| dc.contributor.author | Krishnamurthy, Giridharan | |
| dc.contributor.author | Shih, Wen-Ching | |
| dc.contributor.author | Haenen, Ken | |
| dc.contributor.author | krishnam | |
| dc.contributor.imecauthor | Pobedinskas, Paulius | |
| dc.contributor.imecauthor | Krishnamurthy, Giridharan | |
| dc.contributor.imecauthor | Haenen, Ken | |
| dc.contributor.imecauthor | Mallik, Awadesh | |
| dc.contributor.orcidimec | Pobedinskas, Paulius::0000-0001-8136-5172 | |
| dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
| dc.date.accessioned | 2024-11-18T10:14:53Z | |
| dc.date.available | 2024-08-16T18:29:17Z | |
| dc.date.available | 2024-11-18T10:14:53Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | Mr. Johnny Baccus and Ms. Christel Willems supported experimental planning and execution. Prof. Jan D'Haen kindly helped in getting the SEM data. AKM and PP acknowledge FWO - Research Foundation Flanders, for providing postdoctoral fellowship. All data generated or analyzed during this study are included in this published article. The datasets generated during and/or analyzed during the current study are available from the corresponding author upon reasonable request. | |
| dc.identifier.doi | 10.1016/j.jcrysgro.2024.127836 | |
| dc.identifier.issn | 0022-0248 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44337 | |
| dc.publisher | ELSEVIER | |
| dc.source.beginpage | Art. 127836 | |
| dc.source.endpage | N/A | |
| dc.source.issue | 15 October | |
| dc.source.journal | JOURNAL OF CRYSTAL GROWTH | |
| dc.source.numberofpages | 12 | |
| dc.source.volume | 644 | |
| dc.subject.keywords | PLASMA CVD | |
| dc.subject.keywords | GALLIUM NITRIDE | |
| dc.subject.keywords | LOW-PRESSURE | |
| dc.subject.keywords | MICROWAVE | |
| dc.subject.keywords | RAMAN | |
| dc.subject.keywords | SPECTROSCOPY | |
| dc.subject.keywords | TEMPERATURES | |
| dc.subject.keywords | NUCLEATION | |
| dc.subject.keywords | APPARATUS | |
| dc.subject.keywords | SPECTRA | |
| dc.title | Effect of linear antenna chemical vapor deposition process parameters on the growth of nanocrystalline diamond-on-GaN films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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