Publication:
FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits
| dc.contributor.author | Capogreco, Elena | |
| dc.contributor.author | Arimura, Hiroaki | |
| dc.contributor.author | Ritzenthaler, Romain | |
| dc.contributor.author | Brus, Stephan | |
| dc.contributor.author | Oniki, Yusuke | |
| dc.contributor.author | Dupuy, Emmanuel | |
| dc.contributor.author | Sebaai, Farid | |
| dc.contributor.author | Radisic, Dunja | |
| dc.contributor.author | Chan, BT | |
| dc.contributor.author | Zhou, Daisy | |
| dc.contributor.author | Machkaoutsan, V. | |
| dc.contributor.author | Yoon, S. | |
| dc.contributor.author | Itokawa, H. | |
| dc.contributor.author | Yamaguchi, M. | |
| dc.contributor.author | Gao, Z. | |
| dc.contributor.author | Fazan, P. | |
| dc.contributor.author | Chen, Y. | |
| dc.contributor.author | Subramanian, Sujith | |
| dc.contributor.author | Ragnarsson, Lars-Ake | |
| dc.contributor.author | Spessot, Alessio | |
| dc.contributor.imecauthor | Capogreco, Elena | |
| dc.contributor.imecauthor | Arimura, Hiroaki | |
| dc.contributor.imecauthor | Ritzenthaler, Romain | |
| dc.contributor.imecauthor | Brus, Stephan | |
| dc.contributor.imecauthor | Oniki, Yusuke | |
| dc.contributor.imecauthor | Dupuy, Emmanuel | |
| dc.contributor.imecauthor | Sebaai, Farid | |
| dc.contributor.imecauthor | Radisic, Dunja | |
| dc.contributor.imecauthor | Chan, BT | |
| dc.contributor.imecauthor | Zhou, Daisy | |
| dc.contributor.imecauthor | Subramanian, Sujith | |
| dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
| dc.contributor.imecauthor | Spessot, Alessio | |
| dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
| dc.contributor.orcidimec | Ritzenthaler, Romain::0000-0002-8615-3272 | |
| dc.contributor.orcidimec | Brus, Stephan::0000-0003-3554-0640 | |
| dc.contributor.orcidimec | Oniki, Yusuke::0000-0002-6619-1327 | |
| dc.contributor.orcidimec | Dupuy, Emmanuel::0000-0003-3341-1618 | |
| dc.contributor.orcidimec | Chan, BT::0000-0003-2890-0388 | |
| dc.contributor.orcidimec | Subramanian, Sujith::0000-0001-8938-9750 | |
| dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
| dc.contributor.orcidimec | Dentoni Litta, Eugenio::0000-0003-0333-376X | |
| dc.date.accessioned | 2023-06-01T13:01:00Z | |
| dc.date.available | 2023-05-25T20:20:23Z | |
| dc.date.available | 2023-06-01T13:01:00Z | |
| dc.date.issued | 2022 | |
| dc.identifier.doi | 10.1109/IEDM45625.2022.10019422 | |
| dc.identifier.eisbn | 978-1-6654-8959-1 | |
| dc.identifier.issn | 2380-9248 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41631 | |
| dc.publisher | IEEE | |
| dc.source.conference | International Electron Devices Meeting (IEDM) | |
| dc.source.conferencedate | DEC 03-07, 2022 | |
| dc.source.conferencelocation | San Francisco | |
| dc.source.journal | na | |
| dc.source.numberofpages | 4 | |
| dc.title | FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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