Publication:
Effect of thermomechanical stress on resonant frequency shift of a silicon MEMS resonator
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1856 since deposited on 2021-10-17
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Acq. date: 2026-10-13
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Statistics
Views
1856 since deposited on 2021-10-17
3last month
1last week
Acq. date: 2026-10-13
Citations