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High-precision optical constants characterization of materials in the EUV spectral range: From large research facilities to laboratory-based instruments
Publication:
High-precision optical constants characterization of materials in the EUV spectral range: From large research facilities to laboratory-based instruments
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Date
2022
Proceedings Paper
https://doi.org/10.1117/12.2640176
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Soltwisch, V.
;
Glabisch, S.
;
Andrle, A.
;
Philipsen, Vicky
;
Saadeh, Q.
;
Schroder, S.
;
Lohr, L.
;
Ciesielski, R.
;
Brose, S.
Journal
Proceedings of SPIE
Abstract
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1256
since deposited on 2022-12-11
1
last month
Acq. date: 2025-12-12
Citations
Metrics
Views
1256
since deposited on 2022-12-11
1
last month
Acq. date: 2025-12-12
Citations