Publication:

RET imaging capbility with 0.85NA ArF immersion lithography

Date

2005

Proceedings Paper

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Author(s)

;

Hendrickx, Eric

;

;

Vandeweyer, Tom

;

Van Look, Lieve

;

Verhaegen, Staf

;

Vandenberghe, Geert

Statistics

1888 since deposited on 2021-10-16

Acq. date: 2026-02-25