Publication:

Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2626309
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dc.contributor.authorLiu, Zuyang
dc.contributor.authorMuliuk, Grigorij
dc.contributor.authorZhang, Jing
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorLe Thomas, Nicolas
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorLiu, Zuyang
dc.contributor.imecauthorMuliuk, Grigorij
dc.contributor.imecauthorZhang, Jing
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.imecauthorLe Thomas, Nicolas
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.contributor.orcidimecLe Thomas, Nicolas::0000-0003-4797-9642
dc.contributor.orcidimecLiu, Zuyang::0000-0002-5003-2305
dc.contributor.orcidimecZhang, Jing::0000-0001-6608-9990
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2023-08-24T10:02:48Z
dc.date.available2023-06-20T10:33:21Z
dc.date.available2023-08-24T10:02:48Z
dc.date.embargo2022-03-05
dc.date.issued2022
dc.identifier.doi10.1117/12.2626309
dc.identifier.eisbn978-1-5106-4880-7
dc.identifier.isbn978-1-5106-4879-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41805
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 1200404
dc.source.conferenceConference on Integrated Optics - Devices, Materials, and Technologies XXVI at SPIE OPTO Conference
dc.source.conferencedateJAN 22-FEB 28, 2022
dc.source.conferencelocationSan Francisco
dc.source.journalProceedings of SPIE
dc.source.numberofpages5
dc.source.volume12004
dc.title

Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling

dc.typeProceedings paper
dspace.entity.typePublication
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