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6Å EOT Si0.45Ge0.55 pMOSFET with optimized reliability (VDD=1V): Meeting the NBTI lifetime target at ultra-thin EOT
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1 since deposited on 2021-10-18
Acq. date: 2025-10-23
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2077 since deposited on 2021-10-18
Acq. date: 2025-10-23
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1 since deposited on 2021-10-18
Acq. date: 2025-10-23
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2077 since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations