Publication:
110GHz Through-Silicon Via's Integrated in Silicon Photonics Interposers for Next-Generation Optical Modules
| dc.contributor.author | Miyaguchi, Kenichi | |
| dc.contributor.author | Ban, Yoojin | |
| dc.contributor.author | Pantano, Nicolas | |
| dc.contributor.author | Sun, Xiao | |
| dc.contributor.author | Absil, Philippe | |
| dc.contributor.author | Bogaerts, Lieve | |
| dc.contributor.author | Verheyen, Peter | |
| dc.contributor.author | Velenis, Dimitrios | |
| dc.contributor.author | Pantouvaki, Marianna | |
| dc.contributor.author | Van Campenhout, Joris | |
| dc.contributor.imecauthor | Miyaguchi, Kenichi | |
| dc.contributor.imecauthor | Ban, Yoojin | |
| dc.contributor.imecauthor | Pantano, Nicolas | |
| dc.contributor.imecauthor | Sun, Xiao | |
| dc.contributor.imecauthor | Absil, Philippe | |
| dc.contributor.imecauthor | Bogaerts, Lieve | |
| dc.contributor.imecauthor | Verheyen, Peter | |
| dc.contributor.imecauthor | Velenis, Dimitrios | |
| dc.contributor.imecauthor | Pantouvaki, Marianna | |
| dc.contributor.imecauthor | Van Campenhout, Joris | |
| dc.contributor.orcidimec | Miyaguchi, Kenichi::0000-0002-7073-6457 | |
| dc.contributor.orcidimec | Verheyen, Peter::0000-0002-8245-9442 | |
| dc.contributor.orcidimec | Van Campenhout, Joris::0000-0003-0778-2669 | |
| dc.contributor.orcidimec | Ban, Yoojin::0000-0001-7319-8132 | |
| dc.date.accessioned | 2022-11-08T08:37:34Z | |
| dc.date.available | 2022-07-31T02:29:17Z | |
| dc.date.available | 2022-11-08T08:37:34Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/ECOC52684.2021.9605927 | |
| dc.identifier.eisbn | 978-1-6654-3868-1 | |
| dc.identifier.issn | na | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40189 | |
| dc.publisher | IEEE | |
| dc.source.conference | European Conference on Optical Communication (ECOC) | |
| dc.source.conferencedate | SEP 13-16, 2021 | |
| dc.source.conferencelocation | Bordeaux | |
| dc.source.journal | na | |
| dc.source.numberofpages | 4 | |
| dc.title | 110GHz Through-Silicon Via's Integrated in Silicon Photonics Interposers for Next-Generation Optical Modules | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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