Publication:

Aqueous chemical solution deposition of LuFeO3 ultra high-k films

Date

2015
Presentation
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dc.contributor.authorGielis, Sven
dc.contributor.authorIvanov, Maksim
dc.contributor.authorPeys, Nick
dc.contributor.authorVan den Ham, Jonathan
dc.contributor.authorPavlovic, Nikolina
dc.contributor.authorRobaeys, Pieter
dc.contributor.authorNesladek, Milos
dc.contributor.authorBanys, Juras
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.contributor.imecauthorNesladek, Milos
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.accessioned2021-10-22T19:24:54Z
dc.date.available2021-10-22T19:24:54Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25315
dc.source.conference39th International Conference and Expostion on Advanced Ceramics and Composites
dc.source.conferencedate25/01/2015
dc.source.conferencelocationFlorida USA
dc.title

Aqueous chemical solution deposition of LuFeO3 ultra high-k films

dc.typeOral presentation
dspace.entity.typePublication
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