Publication:

Optical property changes in low-k films upon ultraviolet-assisted curing

Date

2008
Journal article
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dc.contributor.authorEslava Fernandez, Salvador
dc.contributor.authorEymery, Guillaume
dc.contributor.authorMarsik, Premysl
dc.contributor.authorIacopi, Francesca
dc.contributor.authorKirschhock, Christine E. A.
dc.contributor.authorMaex, Karen
dc.contributor.authorMartens, Johan A.
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-17T07:02:25Z
dc.date.available2021-10-17T07:02:25Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13704
dc.source.beginpageG115
dc.source.endpageG120
dc.source.issue5
dc.source.journalJournal of the Electrochemical Society
dc.source.volume155
dc.title

Optical property changes in low-k films upon ultraviolet-assisted curing

dc.typeJournal article
dspace.entity.typePublication
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