Local identification and mapping of the C49 and C54 titanium phases in submicron structures by micro-Raman spectroscopy

dc.contributor.author	De Wolf, Ingrid
dc.contributor.author	Howard, Dave
dc.contributor.author	Lauwers, Anne
dc.contributor.author	Maex, Karen
dc.contributor.author	Maes, Herman
dc.contributor.imecauthor	De Wolf, Ingrid
dc.contributor.imecauthor	Lauwers, Anne
dc.contributor.imecauthor	Maex, Karen
dc.date.accessioned	2021-09-30T08:07:51Z
dc.date.available	2021-09-30T08:07:51Z
dc.date.embargo	9999-12-31
dc.date.issued	1997
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/1827
dc.source.beginpage	2262
dc.source.endpage	2264
dc.source.issue	17
dc.source.journal	Appl. Phys. Lett.
dc.source.volume	70
dc.title	Local identification and mapping of the C49 and C54 titanium phases in submicron structures by micro-Raman spectroscopy
dc.type	Journal article
dspace.entity.type	Publication
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