Publication:
Copper CMP challenges for ULK and advanced barriers
Date
| dc.contributor.author | Vos, Ingrid | |
| dc.contributor.imecauthor | Vos, Ingrid | |
| dc.date.accessioned | 2021-10-14T23:57:53Z | |
| dc.date.available | 2021-10-14T23:57:53Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7039 | |
| dc.source.conference | 7th Annual International Conference on Chemical Mechanical Planarization | |
| dc.source.conferencedate | 10/10/2002 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | Copper CMP challenges for ULK and advanced barriers | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |