Achieving 9ps unloaded ring oscillator delay in FuSI/HfSiON with 0.8 nm EOT

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Author(s)

Rothschild, Aude

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Everaert, Jean-Luc

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Kerner, Christoph

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Chiarella, Thomas

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Hoffmann, Thomas

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Vrancken, Christa

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Shickova, Adelina

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Mitsuhashi, Riichirou

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Veloso, Anabela

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Absil, Philippe

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Biesemans, Serge

Metrics

1937 since deposited on 2021-10-16

Acq. date: 2025-10-22