Publication:
Development status of EUV resist
Date
| dc.contributor.author | Hirayama, Taku | |
| dc.contributor.author | Utsumi, Yoshiyuki | |
| dc.contributor.author | Iwashita, Jun | |
| dc.contributor.author | Kawana, Daisuke | |
| dc.contributor.author | Lorusso, Gian | |
| dc.contributor.imecauthor | Lorusso, Gian | |
| dc.date.accessioned | 2021-10-21T08:17:40Z | |
| dc.date.available | 2021-10-21T08:17:40Z | |
| dc.date.issued | 2013 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22492 | |
| dc.source.conference | Semicon Korea | |
| dc.source.conferencedate | 30/01/2013 | |
| dc.source.conferencelocation | Seoul Korea | |
| dc.title | Development status of EUV resist | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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