Investigation by convergent beam electron diffraction of the stress around shallow trench isolation structures

dc.contributor.author	Stuer, Cindy
dc.contributor.author	Van Landuyt, J.
dc.contributor.author	Bender, Hugo
dc.contributor.author	De Wolf, Ingrid
dc.contributor.author	Rooyackers, Rita
dc.contributor.author	Badenes, Gonçal
dc.contributor.imecauthor	Bender, Hugo
dc.contributor.imecauthor	De Wolf, Ingrid
dc.contributor.orcidimec	De Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned	2021-10-14T17:55:36Z
dc.date.available	2021-10-14T17:55:36Z
dc.date.issued	2001
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/5688
dc.source.beginpage	G597
dc.source.endpage	G601
dc.source.issue	11
dc.source.journal	Journal of the Electrochemical Society
dc.source.volume	148
dc.title	Investigation by convergent beam electron diffraction of the stress around shallow trench isolation structures
dc.type	Journal article
dspace.entity.type	Publication
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