Publication:
Double litho, double etch (LELE) process challenges for 22nm HP and beyond
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1910 since deposited on 2021-10-17
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Acq. date: 2026-08-05
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Statistics
Views
1910 since deposited on 2021-10-17
2last month
2last week
Acq. date: 2026-08-05
Citations