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Custom table-top anodisation cell for porosification of large silicon wafers

Date

2014
Meeting abstract
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dc.contributor.authorNabuurs, Marius
dc.contributor.authorMartini, Roberto
dc.contributor.authorDepauw, Valerie
dc.contributor.authorSivaramakrishnan Radhakrishnan, Hariharsudan
dc.contributor.authorQian, Jun
dc.contributor.authorGordon, Ivan
dc.contributor.imecauthorDepauw, Valerie
dc.contributor.imecauthorSivaramakrishnan Radhakrishnan, Hariharsudan
dc.contributor.imecauthorGordon, Ivan
dc.contributor.orcidimecDepauw, Valerie::0000-0003-2045-9698
dc.contributor.orcidimecSivaramakrishnan Radhakrishnan, Hariharsudan::0000-0003-1963-273X
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.date.accessioned2021-10-22T04:06:11Z
dc.date.available2021-10-22T04:06:11Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24296
dc.source.conferencePorous Semiconductor Science and Technology Conference
dc.source.conferencedate9/03/2014
dc.source.conferencelocationAlicante Spain
dc.title

Custom table-top anodisation cell for porosification of large silicon wafers

dc.typeMeeting abstract
dspace.entity.typePublication
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