Publication:
Trends in the oxygen enhancement of the ionisation probabilities of elements sputtered from Si
Date
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Huyghebaert, Cedric | |
| dc.contributor.author | Vandervorst, Alain | |
| dc.contributor.imecauthor | Huyghebaert, Cedric | |
| dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
| dc.date.accessioned | 2021-10-14T21:54:12Z | |
| dc.date.available | 2021-10-14T21:54:12Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6432 | |
| dc.source.conference | 3rd European Workshop on Secondary Ion Mass Spectrometry - SIMS Europe | |
| dc.source.conferencedate | 15/09/2002 | |
| dc.source.conferencelocation | Münster Germany | |
| dc.title | Trends in the oxygen enhancement of the ionisation probabilities of elements sputtered from Si | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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