Novel fabrication process for integration of microwave sensors in microfluidic channels

dc.contributor.author	Bao, Juncheng
dc.contributor.author	Markovic, Tomislav
dc.contributor.author	Brancato, Luigi
dc.contributor.author	Kil, Dries
dc.contributor.author	Ocket, Ilja
dc.contributor.author	Puers, Bob
dc.contributor.author	Nauwelaers, Bart
dc.contributor.imecauthor	Markovic, Tomislav
dc.contributor.imecauthor	Kil, Dries
dc.contributor.imecauthor	Ocket, Ilja
dc.contributor.imecauthor	Puers, Bob
dc.contributor.imecauthor	Nauwelaers, Bart
dc.contributor.orcidimec	Markovic, Tomislav::0000-0002-9645-5565
dc.date.accessioned	2021-10-28T20:14:15Z
dc.date.available	2021-10-28T20:14:15Z
dc.date.issued	2020
dc.identifier.doi	10.3390/mi11030320
dc.identifier.issn	2072-666X
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/34696
dc.source.beginpage	320
dc.source.issue	3
dc.source.journal	Micromachines
dc.source.volume	11
dc.title	Novel fabrication process for integration of microwave sensors in microfluidic channels
dc.type	Journal article
dspace.entity.type	Publication
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