Publication:

High energy x-ray photoelectron spectroscopy spectra of Si3N4 measured by Cr K alpha

Date

2022
Journal article
https://doi.org/10.1116/6.0001524
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dc.contributor.authorHoflijk, Ilse
dc.contributor.authorVanleenhove, Anja
dc.contributor.authorVaesen, Inge
dc.contributor.authorZborowski, Charlotte
dc.contributor.authorArtyushkova, K.
dc.contributor.authorConard, Thierry
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorVanleenhove, Anja
dc.contributor.imecauthorVaesen, Inge
dc.contributor.imecauthorZborowski, Charlotte
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecHoflijk, I.::0000-0002-8351-3340
dc.contributor.orcidimecZborowski, C.::0000-0001-6276-7109
dc.contributor.orcidimecVaesen, Inge::0000-0003-3533-4679
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2023-07-17T12:35:17Z
dc.date.available2023-06-20T10:33:59Z
dc.date.available2023-07-17T12:35:17Z
dc.date.issued2022
dc.identifier.doi10.1116/6.0001524
dc.identifier.issn1055-5269
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41832
dc.publisherAIP Publishing
dc.source.beginpageArt. 014013
dc.source.endpagena
dc.source.issue1
dc.source.journalSURFACE SCIENCE SPECTRA
dc.source.numberofpages8
dc.source.volume29
dc.title

High energy x-ray photoelectron spectroscopy spectra of Si3N4 measured by Cr K alpha

dc.typeJournal article
dspace.entity.typePublication
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