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Quantitative depth profiling of SiGe-multilayers with the atom probe
Publication:
Quantitative depth profiling of SiGe-multilayers with the atom probe
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Koelling, Sebastian
;
Gilbert, Matthieu
;
Goossens, Jozefien
;
Hikavyy, Andriy
;
Richard, Olivier
;
Vandervorst, Wilfried
Journal
Surface and Interface Analysis
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1872
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations
Metrics
Views
1872
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations