Publication:
BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure
| dc.contributor.author | Fang, Yu | |
| dc.contributor.author | Lesniewska, Alicja | |
| dc.contributor.author | Ciofi, Ivan | |
| dc.contributor.author | Roussel, Philippe | |
| dc.contributor.author | Wu, Chen | |
| dc.contributor.author | Vega Gonzalez, Victor | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.imecauthor | Fang, Yu | |
| dc.contributor.imecauthor | Lesniewska, Alicja | |
| dc.contributor.imecauthor | Ciofi, Ivan | |
| dc.contributor.imecauthor | Roussel, Philippe | |
| dc.contributor.imecauthor | Wu, Chen | |
| dc.contributor.imecauthor | Vega Gonzalez, Victor | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.orcidimec | Fang, Yu::0000-0002-9442-524X | |
| dc.contributor.orcidimec | Lesniewska, Alicja::0000-0003-3863-065X | |
| dc.contributor.orcidimec | Ciofi, Ivan::0000-0003-1374-4116 | |
| dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
| dc.contributor.orcidimec | Wu, Chen::0000-0002-4636-8842 | |
| dc.contributor.orcidimec | Vega Gonzalez, Victor::0000-0002-4320-0585 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.date.accessioned | 2024-12-19T09:02:27Z | |
| dc.date.available | 2024-08-16T18:29:16Z | |
| dc.date.available | 2024-12-19T09:02:27Z | |
| dc.date.issued | 2024 | |
| dc.identifier.doi | 10.1109/IRPS48228.2024.10529311 | |
| dc.identifier.eisbn | 979-8-3503-6976-2 | |
| dc.identifier.isbn | 979-8-3503-6977-9 | |
| dc.identifier.issn | 1541-7026 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44336 | |
| dc.publisher | IEEE | |
| dc.source.conference | International Reliability Physics Symposium (IRPS) | |
| dc.source.conferencedate | APR 14-18, 2024 | |
| dc.source.conferencelocation | Grapevine | |
| dc.source.journal | N/A | |
| dc.source.numberofpages | 7 | |
| dc.title | BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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