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Cross-sectional transmission electron microscopy and focused ion beam study of advanced silicon devices
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Cross-sectional transmission electron microscopy and focused ion beam study of advanced silicon devices
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Date
1997
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1699.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bender, Hugo
;
Roussel, Philippe
Journal
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Acq. date: 2025-12-15
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Views
1895
since deposited on 2021-09-30
1
last month
1
last week
Acq. date: 2025-12-15
Citations