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Impact of crystallization behavior of SrxTiyOz films on electrical properties of metal-insulator-metal capacitors with TiN electrodes

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1940 since deposited on 2021-10-18
2last month
Acq. date: 2025-12-09

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1940 since deposited on 2021-10-18
2last month
Acq. date: 2025-12-09

Citations