Publication:
Demonstration of High-quality GaN Epitaxy on 200 mm Engineered Substrates for Vertical Power Device Fabrication
Date
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| cris.virtual.orcid | 0000-0001-6632-6239 | |
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| dc.contributor.author | Geens, Karen | |
| dc.contributor.author | Hahn, Herwig | |
| dc.contributor.author | Liang, Hu | |
| dc.contributor.author | Borga, Matteo | |
| dc.contributor.author | Cingu, Deepthi | |
| dc.contributor.author | You, Shuzhen | |
| dc.contributor.author | Marx, Matthias | |
| dc.contributor.author | Oligschlaeger, Robert | |
| dc.contributor.author | Fahle, Dirk | |
| dc.contributor.author | Heuken, Michael | |
| dc.contributor.author | Odnoblyudov, Vladimir | |
| dc.contributor.author | Aktas, Ozgur | |
| dc.contributor.author | Basceri, Cem | |
| dc.contributor.author | Decoutere, Stefaan | |
| dc.contributor.imecauthor | Geens, Karen | |
| dc.contributor.imecauthor | Liang, Hu | |
| dc.contributor.imecauthor | Borga, Matteo | |
| dc.contributor.imecauthor | Cingu, Deepthi | |
| dc.contributor.imecauthor | You, Shuzhen | |
| dc.contributor.imecauthor | Decoutere, Stefaan | |
| dc.contributor.orcidimec | Geens, Karen::0000-0003-1815-3972 | |
| dc.contributor.orcidimec | Borga, Matteo::0000-0003-3087-6612 | |
| dc.contributor.orcidimec | Decoutere, Stefaan::0000-0001-6632-6239 | |
| dc.date.accessioned | 2021-10-31T08:39:53Z | |
| dc.date.available | 2021-10-31T08:39:53Z | |
| dc.date.issued | 2021 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/36720 | |
| dc.source.conference | 2021 International Conference on Compound Semiconductor Manufacturing Technology (CS Mantech) | |
| dc.source.conferencedate | 24/05/2021 | |
| dc.source.conferencelocation | Virtual conference Virtual conference | |
| dc.title | Demonstration of High-quality GaN Epitaxy on 200 mm Engineered Substrates for Vertical Power Device Fabrication | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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