Publication:

Demonstration of High-quality GaN Epitaxy on 200 mm Engineered Substrates for Vertical Power Device Fabrication

Date

2021
Proceedings Paper
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dc.contributor.authorGeens, Karen
dc.contributor.authorHahn, Herwig
dc.contributor.authorLiang, Hu
dc.contributor.authorBorga, Matteo
dc.contributor.authorCingu, Deepthi
dc.contributor.authorYou, Shuzhen
dc.contributor.authorMarx, Matthias
dc.contributor.authorOligschlaeger, Robert
dc.contributor.authorFahle, Dirk
dc.contributor.authorHeuken, Michael
dc.contributor.authorOdnoblyudov, Vladimir
dc.contributor.authorAktas, Ozgur
dc.contributor.authorBasceri, Cem
dc.contributor.authorDecoutere, Stefaan
dc.contributor.imecauthorGeens, Karen
dc.contributor.imecauthorLiang, Hu
dc.contributor.imecauthorBorga, Matteo
dc.contributor.imecauthorCingu, Deepthi
dc.contributor.imecauthorYou, Shuzhen
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecGeens, Karen::0000-0003-1815-3972
dc.contributor.orcidimecBorga, Matteo::0000-0003-3087-6612
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.accessioned2021-10-31T08:39:53Z
dc.date.available2021-10-31T08:39:53Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36720
dc.source.conference2021 International Conference on Compound Semiconductor Manufacturing Technology (CS Mantech)
dc.source.conferencedate24/05/2021
dc.source.conferencelocationVirtual conference Virtual conference
dc.title

Demonstration of High-quality GaN Epitaxy on 200 mm Engineered Substrates for Vertical Power Device Fabrication

dc.typeProceedings paper
dspace.entity.typePublication
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