Publication:

P+/N junction leakage in thin selectively grown germanium-in-STI substrates

Date

2009
Presentation
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dc.contributor.authorEneman, Geert
dc.contributor.authorYang, Rui
dc.contributor.authorWang, Gang
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorLoo, Roger
dc.contributor.authorClaeys, Cor
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorSimoen, Eddy
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-17T22:07:09Z
dc.date.available2021-10-17T22:07:09Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15278
dc.source.conferenceE-MRS Spring Meeting Symposium I: Silicon and Germanium Issues for Future CMOS Devices
dc.source.conferencedate8/06/2009
dc.source.conferencelocationStrasbourg France
dc.title

P+/N junction leakage in thin selectively grown germanium-in-STI substrates

dc.typeOral presentation
dspace.entity.typePublication
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