Publication:

Interconnects for scaled SRAM with vertical Surrounded Gate Transistors (SGT)

Date

2019
Proceedings Paper
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Author(s)

Boemmels, Juergen  
;
Harada, N.
;
Kim, Min-Soo  
;
Mitard, Jerome  
;
Kikuchi, Yoshiaki  
;
Li, Waikin  
;
Tao, Zheng  
;
Puliyalil, Harinarayanan  
;
Devriendt, Katia  
;
Lorant, Christophe  
;
Le, Quoc Toan  
;
Kesters, Els  
;
Jourdan, Nicolas  
;
El-Mekki, Zaid  
;
Teugels, Lieve  
;
van der Veen, Marleen  
;
Li, Y.
;
Nakamura, H.
;
Mocuta, Dan
;
Masuoka, F.

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1944 since deposited on 2021-10-27
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Acq. date: 2026-05-13

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