Publication:
Challenges of aggressive scaling of ultra low-k dielectric materials
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-19T12:31:09Z | |
| dc.date.available | 2021-10-19T12:31:09Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18518 | |
| dc.source.conference | China Semiconductor Technology International Conference - CSTIC | |
| dc.source.conferencedate | 13/03/2011 | |
| dc.source.conferencelocation | Montreal Canada | |
| dc.title | Challenges of aggressive scaling of ultra low-k dielectric materials | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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