Publication:
Atomic layer deposition of ZrO2, TiO2, and ZrTiO4 thin films
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2006 since deposited on 2021-10-18
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Acq. date: 2026-03-17
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Statistics
Views
2006 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2026-03-17
Citations