Publication:
Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic
| dc.contributor.author | Iraci, Sara | |
| dc.contributor.author | Pokhrel, Ankit | |
| dc.contributor.author | Perez Lozano, Daniel | |
| dc.contributor.author | Soulie, Jean-Philippe | |
| dc.contributor.author | Sarkar, Sujan Kumar | |
| dc.contributor.author | Saroj, Rajendra Kumar | |
| dc.contributor.author | Canvel, Yann | |
| dc.contributor.author | Renaud, Vincent | |
| dc.contributor.author | Walke, Amey | |
| dc.contributor.author | Kenens, Bart | |
| dc.contributor.author | Hodges, Blake | |
| dc.contributor.author | Ibrahim, Seifallah | |
| dc.contributor.author | Josephsen, Trent | |
| dc.contributor.author | Huet, Benjamin | |
| dc.contributor.author | Murdoch, Gayle | |
| dc.contributor.author | Kim, Min-Soo | |
| dc.contributor.author | O'Neal, Sabine | |
| dc.contributor.author | Herr, Quentin | |
| dc.contributor.author | Herr, Anna | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.imecauthor | Iraci, Sara | |
| dc.contributor.imecauthor | Pokhrel, Ankit | |
| dc.contributor.imecauthor | Soulie, Jean-Philippe | |
| dc.contributor.imecauthor | Sarkar, Sujan Kumar | |
| dc.contributor.imecauthor | Saroj, Rajendra Kumar | |
| dc.contributor.imecauthor | Canvel, Yann | |
| dc.contributor.imecauthor | Renaud, Vincent | |
| dc.contributor.imecauthor | Kenens, Bart | |
| dc.contributor.imecauthor | Hodges, Blake | |
| dc.contributor.imecauthor | Huet, Benjamin | |
| dc.contributor.imecauthor | Murdoch, Gayle | |
| dc.contributor.imecauthor | Kim, Min-Soo | |
| dc.contributor.imecauthor | Herr, Anna | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Perez Lozano, Daniel | |
| dc.contributor.imecauthor | Walke, Amey | |
| dc.contributor.orcidimec | Iraci, Sara::0009-0006-1899-8210 | |
| dc.contributor.orcidimec | Pokhrel, Ankit::0009-0008-2524-3611 | |
| dc.contributor.orcidimec | Soulie, Jean-Philippe::0000-0002-5956-6485 | |
| dc.contributor.orcidimec | Sarkar, Sujan Kumar::0000-0002-8471-6297 | |
| dc.contributor.orcidimec | Saroj, Rajendra Kumar::0000-0002-3684-5959 | |
| dc.contributor.orcidimec | Canvel, Yann::0009-0006-7501-9787 | |
| dc.contributor.orcidimec | Renaud, Vincent::0009-0009-7686-4474 | |
| dc.contributor.orcidimec | Kenens, Bart::0000-0003-2329-5449 | |
| dc.contributor.orcidimec | Huet, Benjamin::0000-0003-4084-5705 | |
| dc.contributor.orcidimec | Murdoch, Gayle::0000-0002-6833-220X | |
| dc.contributor.orcidimec | Kim, Min-Soo::0000-0003-0211-0847 | |
| dc.contributor.orcidimec | Herr, Anna::0000-0001-9247-0090 | |
| dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
| dc.contributor.orcidimec | Perez Lozano, Daniel::0000-0003-3098-3266 | |
| dc.contributor.orcidimec | Walke, Amey::0000-0001-8406-8122 | |
| dc.date.accessioned | 2025-06-17T12:25:52Z | |
| dc.date.available | 2025-03-06T20:46:06Z | |
| dc.date.available | 2025-06-17T12:25:52Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | Work at imec VZW and imec USA is supported by imec INVEST+ and by Osceola County Florida. The authors would also like to acknowledge the support of imec's FAB team. | |
| dc.identifier.doi | 10.1109/IITC61274.2024.10732342 | |
| dc.identifier.eisbn | 979-8-3503-8517-5 | |
| dc.identifier.isbn | 979-8-3503-8518-2 | |
| dc.identifier.issn | 2380-632X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45328 | |
| dc.publisher | IEEE | |
| dc.source.conference | 2024 International Interconnect Technology Conference | |
| dc.source.conferencedate | JUN 03-06, 2024 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.journal | N/A | |
| dc.source.numberofpages | 3 | |
| dc.title | Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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