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Surface and interface cleaning and passivation of III-V semiconductor materials

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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.departmentfed5e91b-8ee8-431b-807e-123f13c18370
cris.virtualsource.orcidfed5e91b-8ee8-431b-807e-123f13c18370
dc.contributor.advisorDe Gendt, Stefan
dc.contributor.authorCuypers, Daniel
dc.date.accessioned2026-05-05T12:01:06Z
dc.date.available2026-05-05T12:01:06Z
dc.date.issued2014-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59336
dc.provenance.editstepusermeghan.oneill@imec.be
dc.title

Surface and interface cleaning and passivation of III-V semiconductor materials

dc.typePHD thesis
dspace.entity.typePublication
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