Publication:

Development of ALD HfZrOx with TDEAH, TDEAZ and H2O

Date

2010
Proceedings Paper
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Author(s)

Shi, Xiaoping
;
Tielens, Hilde  
;
Takeoka, Shinji
;
Nakabayashi, Takashi
;
Nyns, Laura  
;
Adelmann, Christoph  
;
Delabie, Annelies  
;
Schram, Tom  
;
Ragnarsson, Lars-Ake  
;
Schaekers, Marc  
;
Date, Lucien  
;
Schreutelkamp, Rob
;
Van Elshocht, Sven  

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1907 since deposited on 2021-10-18
Acq. date: 2025-12-09

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