Publication:
Surface chemistry and interface formation during the atomic layer deposition of alumina from trimethyl aluminum and water on indium phosphide
Loading...
Journal
Abstract
Description
Metrics
Views
1948 since deposited on 2021-10-21
426item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1948 since deposited on 2021-10-21
426item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations