Publication:

Focused ion beam analysis of Cu/LOW-k metallization structures

Date

2003
Proceedings Paper
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dc.contributor.authorBender, Hugo
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-10-15T04:00:31Z
dc.date.available2021-10-15T04:00:31Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7192
dc.source.beginpage357
dc.source.conferenceAnalytical Techniques for Semiconductor Materials and Processes
dc.source.conferencedate27/04/2003
dc.source.conferencelocationParis France
dc.source.endpage372
dc.title

Focused ion beam analysis of Cu/LOW-k metallization structures

dc.typeProceedings paper
dspace.entity.typePublication
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