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Impact of EUV off-axis illumination on full field imaging performance for NXE:3100
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Impact of EUV off-axis illumination on full field imaging performance for NXE:3100
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Date
2011
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Philipsen, Vicky
;
Hendrickx, Eric
;
Philippou, Alexander
;
Klostermann, Ulrich
;
Gao, Weimin
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1892
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1892
since deposited on 2021-10-19
3
last month
Acq. date: 2025-12-13
Citations