Publication:

A 60GHz silicon micromachined cavity resonator with integrated tuning MEMS array

Date

2009
Proceedings Paper
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Author(s)

Dancila, Dragos
;
Ekkels, Phillip
;
Simon, Pascal
;
Jourdain, Anne  
;
Phommahaxay, Alain  
;
Rottenberg, Xavier  
;
Huynen, Isabelle
;
Ocket, Ilja  
;
Nauwelaers, Bart  
;
Puers, Bob  
;
De Raedt, Walter  
;
Tilmans, Harrie  

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1983 since deposited on 2021-10-17
Acq. date: 2025-12-13

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1983 since deposited on 2021-10-17
Acq. date: 2025-12-13

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