Publication:
A 60GHz silicon micromachined cavity resonator with integrated tuning MEMS array
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1982 since deposited on 2021-10-17
Acq. date: 2025-10-25
Citations
Metrics
Views
1982 since deposited on 2021-10-17
Acq. date: 2025-10-25
Citations