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Fundamental study of photomodulated optical reflectance towards non-destructive carrier profiling in silicon

Date

2011-05
Dissertation
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dc.contributor.authorBogdanowicz, Janusz
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.thesisadvisorVandervorst, Wilfried
dc.date.accessioned2021-10-19T12:37:14Z
dc.date.available2021-10-19T12:37:14Z
dc.date.embargo9999-12-31
dc.date.issued2011-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18596
dc.title

Fundamental study of photomodulated optical reflectance towards non-destructive carrier profiling in silicon

dc.typePHD thesis
dspace.entity.typePublication
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