Publication:

Collaborative work on reducing the intersite gaps in outgassing qualification

Date

2015
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorInoue, Soichi
dc.contributor.authorShiobara, Eishi
dc.contributor.authorSasami, Takeshi
dc.contributor.authorTakagi, Isamu
dc.contributor.authorKikuchi, Yukiko
dc.contributor.authorFujimori, Toru
dc.contributor.authorMinegishi, Shinya
dc.contributor.authorBerg, Robert
dc.contributor.authorLucatorto, Thomas
dc.contributor.authorHill, Shannon
dc.contributor.authorTanio, Charles
dc.contributor.authorPollentier, Ivan
dc.contributor.authorLin, Yen-Chih
dc.contributor.authorFan, Yu-Jen
dc.contributor.authorAshworth, Dominic
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.date.accessioned2021-10-22T19:51:26Z
dc.date.available2021-10-22T19:51:26Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25417
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2207813
dc.source.beginpage942212
dc.source.conferenceExtreme Ultraviolet (EUV) Lithography VI
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, Ca USA
dc.title

Collaborative work on reducing the intersite gaps in outgassing qualification

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
35795.pdf
Size:
996.58 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions