Publication:
A versatile LPCVD silicon nitride platform for heterogenous photonic circuits: Ultra tight thickness control and low propagation loss
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Acq. date: 2026-10-05
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Acq. date: 2026-10-05
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4 since deposited on 2021-10-27
Acq. date: 2026-10-05
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1958 since deposited on 2021-10-27
1last month
Acq. date: 2026-10-05
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