Publication:

Si cap passivation for Ge nMOS applications

Date

2013

Journal article

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Files

26015.pdf 1.27 MB

Author(s)

;

Vanherle, Wendy

;

;

Ceuppens, Joris

;

Ivanov, Tsvetan

;

;

;

Delabie, Annelies

;

Conard, Thierry

;

Struyf, Herbert

;

De Gendt, Stefan

;

;

Collaert, Nadine

;

Journal

Microelectronic Engineering

Statistics

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